Multivariable feedback relevant system identification of a wafer stepper system
نویسندگان
چکیده
منابع مشابه
Multivariable feedback relevant system identification of a wafer stepper system
This paper discusses the approximate and feedback relevant parametric identi cation of a positioning mechanism present in a wafer stepper. The positioning mechanism in a wafer stepper is used in chip manufacturing processes for accurate positioning of the silicon wafer on which the chips are to be produced. The accurate positioning requires a robust and high performance feedback controller that...
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ژورنال
عنوان ژورنال: IEEE Transactions on Control Systems Technology
سال: 2001
ISSN: 1063-6536
DOI: 10.1109/87.911390